[期刊论文] |
来源:Microsystem Technologies. 2020 ;26(6):1777-1782.doi:10.1007/s00542-019-04722-7
出版社:Springer Nature
[期刊论文] |
来源:Journal of Electronic Materials. 2022 ;51(12):7105-7112.doi:10.1007/s11664-022-09946-4
出版社:Springer Nature
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