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A barrier discharge experimental setup for low-pressure and large-area
(400mmx600mm) surface modification of polymers is reported. The
low-pressure barrier discharge plasma consists of pulsed and glow-like
breakdowns with peak widths of several microseconds and leads to the
uniform surface modification of polymers. In contrast, the filamentary
discharges produced at atmospheric pressure cause surface damage and
nonuniform treatment of polymers. This study indicates that barrier
discharge plasmas generated in the small gas spacing at low discharge
pressure result in efficient collisions between polymer surface and
activated species, and an extremely low consumption of feed gas and
discharge power.
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