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The manufacturing and application of micro-optical elements are constantly evolving toward miniaturization, integration, and intelligence and have important applications in holographic displays, optical imaging, laser processing, information processing, and other fields. Ultrafast lasers, with their ultrashort pulse width, extremely high peak power, high processing resolution, small thermal influence zone, and nondestructive material processing advantages, have become an important processing method for preparing micro-optical elements. However, the laser output from the laser usually has a Gaussian distribution, with limitations in spatial and temporal energy and shape distribution, making it difficult to meet the requirements of processing efficiency and quality, which poses new challenges to ultrafast laser manufacturing technology. Therefore, by shaping the ultrafast laser beam and regulating nonlinear optical effects, the optimization and adjustment of the beam shape can be achieved, thus improving the quality and efficiency of micro-optical element processing. Ultrafast laser beam shaping technology provides a new method for the manufacture of micro-optical elements. This article first introduces the commonly used manufacturing methods for micro-optical elements. Second, from the perspective of the temporal domain, spatial domain, and spatiotemporal domain, the basic principles, methods, and existing problems of ultrafast laser beam shaping are summarized. Then, the application of these shaping technologies in the preparation of micro-optical elements is elaborated. Finally, the challenges and future development prospects of ultrafast laser beam shaping technology are discussed.
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