[期刊论文]


Damping in micro-scale generalized thermoelastic circular plate resonators

作   者:
J.N. Sharma;R. Sharma;

出版年:2011

页     码:352 - 358
出版社:Elsevier BV


摘   要:

The out-of-plane vibrations of a generalized thermoelastic circular plate are studied under different environmental temperature, plate dimensions and boundary conditions. The analytical expressions for thermoelastic damping of vibration and phase velocity of circumferential surface wave modes are obtained. It is noticed that the damping of vibrations and phase velocities of circumferential surface wave modes significantly depend on thermal relaxation time in addition to thermoelastic coupling in circular plates under resonance conditions. The surface conditions also impose significant effects on the vibrations of such resonators. The expressions for displacement and temperature fields in the plate resonator are also derived and obtained. Some numerical results have also been presented for illustration purpose in case of silicon material plate. Copyright © 2010 Elsevier B.V. All rights reserved.



关键字:

Damping ; Resonators ; Thermal relaxation ; Thin plates ; MEMS


所属期刊
Ultrasonics
ISSN: 0041-624X
来自:Elsevier BV